ISO INTERNATIONAL STANDARD 25178-605 First edition 2014-02-01 Geometrical product specifications (GPS) Surface texture: Areal - Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments Speécification géomeétrique des produits (GPS) - Etat de surface: Surfacique Partie 605: Caractéristiques nominales des instruments sans contact (capteur autofocus a point) Reference number IS0 25178-605:2014(E) ISO CopyrihtInternational Organization for Standardization @ IS0 2014 ed without license from IHS Not for Resale IS0 25178-605:2014(E) COPYRIGHTPROTECTEDDOCUMENT @ISO2014 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56 : CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax +4122 749 09 47 E-mail copyright@iso.org Web www.iso.org Published in Switzerland @ IS0 2014 - All rights reserved No reproduction or networking permited without license from IHS Not for Resale IS0 25178-605:2014(E) Contents Page Foreword ..iv Introduction. ..vi 1 Scope. ..1 2 Normative references ..1 3 Terms and definitions ..1 3.1 Terms and definitions related to all areal surface texture measurement methods 3.2 Terms and definitions related to x- and y-scanning systems. ..9 3.3 Terms and definitions related to optical systems. 11 3.4 Terms and definitions related to optical properties of workpiece 12 3.5 Terms and definitions specific to point autofocus profiling .13 4 Descriptions of the influence guantities ..14 4.1 General .14 4.2 Influence quantities. ..14 Annex A (informative) General principles. .16 Annex B (informative) Spot size and focal shift ..20 Annex C (informative) Beam offset direction and maximum acceptable local slope ..23 Annex D (informative) Features of an areal surface texture measuring instrument. ..26 Annex E (informative) Others: Non-measured point (autofocus error) .28 Annex F (informative) Relation to the GPS matrix ..29 Bibliography. ..31 ii t license from IHS Not for Resale