ISO INTERNATIONAL STANDARD 25178-606 First edition 2015-06-15 Geometrical product specification (GPS) Surface texture: Areal - Part 606: Nominal characteristics of non-contact (focus variation) instruments Speécification géomeétrique des produits (GPS) - Etat de surface: Surfacique Partie 606: Caractéristiques nominales des instruments sans contact (a variation de focale) Accessed by UNSW - LIBRARY on 15 Jun 2016 (Document currency not guaranteed when printed) Reference number IS0 25178-606:2015(E) ISO @ IS0 2015 IS0 25178-606:2015(E) COPYRIGHTPROTECTEDDOCUMENT IS0 2015, Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form writtenpermission.Permission canberequestedfromeitherIsOattheaddressbelow orIso'smemberbodyinthecountryof the requester. ISO copyrightoffice Ch. de Blandonnet 8 . CP 401 CH-1214 Vernier, Geneva, Switzerland Tel. +41 22 749 01 11 Fax +41 22 749 09 47 copyright@iso.org www.iso.org i @ IS0 2015 - All rights reserved IS0 25178-606:2015(E) Contents Page Foreword ..iv Introduction. ...vi 1 Scope. 2 Normative references ..1 3 Terms and definitions 3.1 Terms and definitions related to all areal surface texture measurement methods 3.2 Terms and definitions related to x- and y-scanning systems. 3.3 Terms and definitions related to optical systems. .11 3.4 Terms and definitions related to optical properties of the workpiece .13 3.5 Terms and definitions specific to focus variation instruments ..13 4 Description of the influence quantities ..16 4.1 General 16 4.2 Overview ..17 4.3 Influence quantities. ..17 Annex A (informative) Components of a focus variation microscope ..19 Annex B (informative) Relation to the GPS matrix model ..25 Bibliography .27 Accessed by UNSW - LIBRARY on 15 Jun 2016 (Document currency not guaranteed when printed) @ IS0 2015 - All rights reserved ii