IEC ISO TEC/TS 62622 Edition 1.02012-10 TECHNICAL SPECIFICATION Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings IEC/TS62622:2012(E) Copy yrighted material l THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright @ 2012 IEC, Geneva, Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from eitherIEC orIEC's memberNational Committee inthecountry of therequester. please contact the address below oryourlocal IECmember National Committee for further information. IEC Central Office Tel.: +41 22 919 02 11 3, rue de Varembé Fax: +41 22 919 03 00 CH-1211 Geneva 20 [email protected] Switzerland www.iec.ch About the IEC (Scientific), Inc., The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes International Standards for all electrical, electronic and related technologies. About IEC publications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the latest edition,a corrigenda oran amendment might have beenpublished. Useful links: IECpublications search-www.iec.ch/searchpub Electropedia - www.electropedia.org The advanced search enables you to find IEC publications The world's leading online dictionary of electronic and by a variety of criteria (reference number, text, technical electrical terms containing more than 30 000 terms and committee... definitions in English and French, with equivalent terms in It also gives information on projects, replaced and additional languages. Also known as the International withdrawn publications. Electrotechnical Vocabulary (IEV)on-line. IECJustPublished-webstore.iec.ch/justpublished CustomerServiceCentre-webstore.iec.ch/csc Stay up to date on all new IEC publications. Just Publisheo If you wish to give us your feedback on this publication details all new publications released.Available on-line and orneedfurtherassistance,please contact the also once a month by email. Customer Service Centre:[email protected]. reproduction or distribution is permited. Uncontrolled when p material IEC ISO TEC/TS 62622 Edition 1.02012-10 TECHNICAL SPECIFICATION (Scientific), I Inc.. subscr Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings No further reprodu uctionor INTERNATIONAL ELECTROTECHNICAL distribution is permitted. COMMISSION PRICE CODE W ICS 07.030 ISBN 978-2-83220-394-1 Warning! Make sure that you obtained this publication from an authorized distributor.