IEC INTERNATIONAL STANDARD 60747-16-10 QC210021 First edition 2004-07 Semiconductor devices - Part 16-10: Technology Approval Schedule (TAS) for monolithic microwave integrated circuits IEC Referencenumber IEC 60747-16-10:2004(E) Publication numbering As from 1 January 1997 all IEC publications are issued with a designation in the 60000 series.For example, IEC 34-1is now referred to as IEC 60034-1. Consolidated editions The IEc is now publishing consolidated versions of its publications. For example. edition numbers 1.0, 1.1 and 1.2 refer, respectively,to the base publication, the amendments 1 and 2. FurtherinformationonIECpublications The technical content of IEC publications is kept under constant review by the IEC, this.publication, including itsvalidity, is available in the IEc Catalogue of publications (see below) in addition to new editions, amendments and corrigenda. information on the subjects under consideration and work in progress undertaken by the technical committee which has prepared this publication, as well as the list of publications issued, is also available from the following: IEc Web Site (www.iec.ch) Catalogue of IEC publications The on-line catalogue on the IEC web site (www.iec.ch/searchpub) enables you to search by a variety of criteria including text searches, technical committees and date of publication. On-line information is also available on recently issued publications, withdrawn and replaced publications, as well as corrigenda. IEC Just Published This summary of recently issued publications (www.iec.ch/online news/ justpub) is also available by email.Please contact the Customer Service Centre (see below) forfurther information. Customer Service Centre If you have any questions regarding this publication or need further assistance. please contact the Customer Service Centre: Email: [email protected] Tel: +41 22 919 02 11 +41229190300 Fax: IEC INTERNATIONAL STANDARD 60747-16-10 QC 210021 First edition 2004-07 Semiconductordevices- Part 16-10: Technology Approval Schedule (TAS) formonolithic microwaveintegrated circuits @ IEC 2004 Copyright - all rights reserved No part of this publication may be reproduced or utilized in any form or by any means, electronic or International Electrotechnical Commission, 3, rue de Varembe, PO Box 131, CH-1211 Geneva 20, Switzerland Telephone: +41 22 919 02 11 Telefax: +41 22 919 03 00 E-mail: [email protected]: www.iec.ch XA PRICE CODE EC Commission Electrotechnique Internationale InternationalElectrotechnicalCommission MekayaponHan3nekTpoTexHuyeckanKoMuccus For price, see current catalogue 60747-16-10@IEC:2004(E) CONTENTS FOREWORD Foreword to this particular Technology Approval Schedule (TAS) .7 Organizations responsiblefor preparing the present TAS Preface.. INTRODUCTION.. .8 General 1.1 Scope.. 1.2 Normativedocuments.. 1.3 Units, symbols and terminology. 10 1.4 Standard and preferred values .... 10 1.5 Definitions... 10 Definition of the component technology .... 2 12 2.1 Scope.. 12 2.2 Description of activities and flow charts .. 2.3 Technical abstract... 2.4 Requirements for control of subcontractors 16 3 Component design of MMiCs. 3.1 Scope.. 18 3.2 Description of activities and flow charts 18 3.3 Interfaces. 3.4 Validations and control of theprocesses 4 Mask manufacture .23 4.1 Scope. .23 4.2 Description of activities and flow charts.. 4.3 Validation and control of the processes. 4.4 Subcontractors, vendors and internal suppliers ...23 Wafer fabrication of MMICs... 5 .23 5.1 Scope... 5.2 Description of activities and flow charts .24 5.3 Equipment. .26 5.4 Materials .. .26 5.5 Re-work 26 5.6 Validation methods and control of the processes 27 5.7 Interrelationship. .28 Wafer probing of MMICs.. 6 6.1 Scope.. .30 6.2 Description of activities and flow charts .30 6.3 Equipment.. 6.4 Test procedures 6.5 Interrelationship Back-side process for bare chip delivery 7.1 Scope.. 7.2 Description of activity and flow charts. ...32 7.3 Equipment... ...33 7.4 Materials . .33 607