论文标题
介电粒子从暴露于低能电子束的电介质基材上
Dielectric particle lofting from dielectric substrate exposed to low energy electron beam
论文作者
论文摘要
将粒子中的模拟用于研究纳米尺寸的电介质粒子，从暴露于低能电子束的电介质底物倾斜。本文讨论了这种基板与位于其上的粒子之间的电子积累，这可能会导致粒子倾斜。结果令人感兴趣，在半导体行业，月球勘探和灰尘悬浮的解释中减轻灰尘。
The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low energy electron beam. The article discusses the electron accumulation between such a substrate and a particle lying on it, that can cause a particle lofting. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration and the explanation of the dust levitation.
