论文标题

通过二维氮化硼释放层转移的Algan/gan hemts到任意底物

Transferrable AlGaN/GaN HEMTs to Arbitrary Substrates via a Two-dimensional Boron Nitride Release Layer

论文作者

Motala, Michael J., Blanton, Eric, Hilton, Al, Heller, Eric, Muratore, Chris, Burzynski, Katherine, Brown, Jeff, Chabak, Kelson, Durstock, Michael, Snure, Michael, Glavin, Nicholas

论文摘要

将高性能的薄膜设备机械转移到任意基板上是一个令人振奋的机会,可以提高设备性能,探索非传统制造方法,并为软,结构和灵活的电子设备铺平道路。使用二维(2D)氮化硼(BN)释放层,我们证明了Algan/GAN高电子迁移率晶体管(HEMT)通过两个直接范德华(VDW)粘结以及通过聚合物粘合剂胶层转移到任意底物。由于转移过程,未观察到设备降解,并且当直接粘结到与起始晶圆的硅碳化硅(SIC)晶片时,设备温度(600 mW时327°C至132°C)显着降低。通过使用苯并二丁烯(BCB)粘附层中间层的使用,在Kapton和Ceramic Films上很容易转移和表征设备,这代表了将整合到任意底物上的激动人心的机会。在减少这种聚合物粘附层的厚度后,Algan/gan hemts转移到BCB/SIC底物上,导致在运行过程中的峰值温度可比,高达600 mW的峰值与AS成长的晶圆,这表明通过优化层间特性,例如厚度和热导率,例如厚度和热电导率,可以在Polymerable Thection上提高层次的能力,可以在Polimers layers上提高层次的转换。

Mechanical transfer of high performing thin film devices onto arbitrary substrates represents an exciting opportunity to improve device performance, explore non-traditional manufacturing approaches, and paves the way for soft, conformal, and flexible electronics. Using a two-dimensional (2D) boron nitride (BN) release layer, we demonstrate the transfer of AlGaN/GaN high-electron mobility transistors (HEMTs) to arbitrary substrates through both direct van der Waals (vdW) bonding and with a polymer adhesive interlayer. No device degradation was observed due to the transfer process, and a significant reduction in device temperature (327 °C to 132 °C at 600 mW) was observed when directly bonded to a silicon carbide (SiC) wafer relative to the starting wafer. With the use of a benzocyclobutene (BCB) adhesion interlayer, devices were easily transferred and characterized on Kapton and ceramic films, representing an exciting opportunity for integration onto arbitrary substrates. Upon reduction of this polymer adhesive layer thickness, the AlGaN/GaN HEMTs transferred onto a BCB/SiC substrate resulted in comparable peak temperatures during operation at powers as high as 600 mW to the as-grown wafer, revealing that by optimizing interlayer characteristics such as thickness and thermal conductivity, transferrable devices on polymer layers can still improve performance outputs.

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