论文标题
CMS高粒度量热仪的硅传感器
The Silicon Sensors for the High Granularity Calorimeter of CMS
论文作者
论文摘要
在事件速率，集成的光度和辐射暴露方面，高肌度大强壮的大型强调对撞机（HL-LHC）的安装对诸如紧凑型MUON电磁阀（CMS）等实验提出了前所未有的挑战。为了应对这种新环境，将在CMS 2阶段升级期间安装新的探测器，包括用“高粒度量热仪”（HGCAL）更换热量表端盖（HGCAL），其中包含硅传感器和闪闪发光器作为主动元素。硅传感器将在8英寸的晶圆过程中生产，这是用于高能物理学的新型，因此它需要广泛的质量验证。在CMS协作的机构中，首批一批原型传感器进行了电气测试。测试的测试揭示了薄型后部保护层的机械稳定性的主要问题，该方法是由薄的保护层的机械稳定性，该方法既不在6”“ Prototys中都可以看到。遵循这些结果，HGCAL组引入了“前面偏置”的概念，可以在不暴露其背面的情况下测试传感器，验证了适用性，并调整了原型设计以在串联生产中应用此方法。
The installation of the High-Luminosity Large Hadron Collider (HL-LHC) presents unprecedented challenges to experiments like the Compact Muon Solenoid (CMS) in terms of event rate, integrated luminosity and therefore radiation exposures. To cope with this new environment, new detectors will be installed during the CMS Phase 2 Upgrade, including the replacement of the calorimeter endcaps with the "High Granularity Calorimeter" (HGCAL), which contains silicon sensors and scintillators as active elements. The silicon sensors will be produced in an 8" wafer process, which is new for high-energy physics, so it demands extensive quality verification. A first batch of prototype sensors underwent electrical tests at the institutes of the CMS Collaboration. Testing revealed major problems with the mechanical stability of the thin backside protective layer, that were not seen in earlier 6" prototypes produced by a different backside processing method. Following these results, the HGCAL group introduced the concept of "frontside biasing", allowing testing of the sensors without exposing its backside, verified the applicability, and adapted the prototype design to apply this method in series production.
