论文标题
带有皮仪分辨率的纳米机电敏感探测器
A nanoelectromechanical position-sensitive detector with picometer resolution
论文作者
论文摘要
亚纳米位移检测为现代计量学中关键应用的坚实基础奠定了基础。然而，平面内位移的传感主要由光电二极管的差分光电流信号的检测主导，并在纳米范围内分辨率。在这里，我们提出了一个基于纳米机电蹦床谐振器的集成的平面内位移传感器。对于低激光功率为85 $μ$ W的位置分辨率为4 $ pm/hz^{1/2} $，在操作5个周期后的重复性以及良好的长期稳定性后，可重复性为2 nm，该新的检测原理为克服各种研究和应用领域的当前位置检测限制提供了可靠的替代方案。
Sub-nanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 $pm/Hz^{1/2}$ for a low laser power of 85 $μ$W and a repeatability of 2 nm after 5 cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.
