论文标题
光力学惯性传感器
Optomechanical Inertial Sensors
论文作者
论文摘要
我们提出了紧凑的整体式光学惯性传感器的性能分析，该传感器描述了它们的关键基本限制和整体加速噪声底。低频重力敏感性惯性传感器的性能模拟显示10^-11 ms^-2/rthz阶的可达到的加速度噪声地板。此外，从我们的性能模型中，我们确定了传感器设计，灵敏度和带宽贸易空间的优化标准。我们对这些紧凑的机械谐振器进行了表征测量，证明了250kg水平的MQ产品，这突出了它们出色的加速度敏感性。
We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low frequency gravity-sensitive inertial sensors show attainable acceleration noise floors of the order of 10^-11 ms^-2/rtHz. Furthermore, from our performance models, we determine the optimization criteria in our sensor designs, sensitivity, and bandwidth trade space. We conducted characterization measurements of these compact mechanical resonators, demonstrating mQ-products at levels of 250kg, which highlight their exquisite acceleration sensitivity.
