论文标题
总压测量
Total and Partial Pressure Measurement
论文作者
论文摘要
总压力表用于测量独立于气体的系统中的真空水平。局部压力分析仪分别测量每种气体物种的发生。本报告解释了测量方法，总结了总压力真空测量表的测量原理，并更新了标准化工作以进行校准。关于压力测量的问题，本报告解释了四极杆质谱仪的质量过滤，并概述了这些仪器的测量问题。
Total pressure gauges are used to measure the level of vacuum in a system independent of the gas species. Partial pressure analysers measure the occurrence of each gas species separately. This report explains the methodology of measurement, summarizes the measurement principles of total pressure vacuum gauges, and updates the standardization work for their calibration. On the matter of partial pressure measurement, this report explains the mass filtering by the quadrupole mass spectrometers and outlines the measurement problems with these instruments.
