论文标题
铁电PBZR $ _ {1-x} $ ti $ _x $ o $ $ _3 $由基于乙烯的化学溶液合成
Ferroelectric PbZr$_{1-x}$Ti$_x$O$_3$ by ethylene glycol-based chemical solution synthesis
论文作者
论文摘要
我们已经研究了一种基于乙二醇的水稳定溶胶 - 凝胶方法,作为一种溶剂和桥接配体,用于以大量和薄膜形式合成铁电铅锆钛酸钛酸钛酸盐。与传统的Sol-Gel方法相比,该方法具有较低的溶剂毒性,更高的稳定性和简化的合成程序。在菱形方相中,NB掺杂的锆钛酸钛酸钛酸钛酸钛酸盐(PNZT)的陶瓷颗粒具有高密度和良好的压电性能,与文献中报道的陶瓷相媲美,在文献中和商业压电元件中发现的物质相当。此外,通过旋转涂层到铂金化的硅底物上,从同一溶胶制造了九层薄膜堆栈。这些薄膜是无裂纹的,并且显示出较弱的钙钛矿晶粒结构,其方向较弱(111)。薄膜的压电测量结果显示出与文献值相当的压电系数和对疲劳的良好稳定性。
We have investigated a water-stable sol-gel method based on ethylene glycol as a solvent and bridging ligand for the synthesis of ferroelectric lead zirconate titanate in bulk and thin film forms. This method offers lower toxicity of the solvent, higher stability towards atmospheric moisture and a simplified synthetic procedure compared to traditional sol-gel methods. Ceramic pellets of Nb-doped lead zirconate titanate (PNZT) in the rhombohedral phase were produced with high density and good piezoelectric properties, comparable to those reported in the literature and those found in commercial piezoelectric elements. In addition, a nine-layer thin film stack was fabricated from the same sol by spin coating onto platinized silicon substrates. The films were crack-free and showed a dense perovskite grain structure with a weak (111) orientation. Piezoelectric measurements of the film showed a piezoelectric coefficient comparable to literature values and good stability towards fatigue.