论文标题
TowerJazz 180 nm CMOS像素传感器的电荷收集属性在像素几何和偏置参数的依赖性中，使用专用测试车进行了研究：研究者芯片
Charge collection properties of TowerJazz 180 nm CMOS Pixel Sensors in dependence of pixel geometries and bias parameters, studied using a dedicated test-vehicle: the Investigator chip
论文作者
论文摘要
本文包含一组参数的汇编，这些参数影响了收集收集过程，该参数是从一项针对部分耗尽的单片活性像素传感器的全面研究中提取的，其小（<25 um $ $ $ $^2 $）的收集电极在TowerJazz 180 nm CMOS过程中制造。这些结果为在Alpide，Alpide（Alice的第二代内部跟踪系统中使用的芯片）的优化提供了指导，并作为对类似设备的未来模拟研究的参考。研究的参数包括：反向底物偏置，外延层厚度，电荷收集电极尺寸以及电极向周围像素内电子设备的间距。 28 UM音高的像素的结果证实，即使在部分耗尽的电路中，电荷收集也可以很快（<10 ns），并量化了参数对信号共享和振幅的影响，突显了井之间正确间距的重要性以及反向衬底偏置的影响。
This paper contains a compilation of parameters influencing the charge collection process extracted from a comprehensive study of partially depleted Monolithic Active Pixel Sensors with small (<25 um$^2$) collection electrodes fabricated in the TowerJazz 180 nm CMOS process. These results gave guidance for the optimisation of the diode implemented in ALPIDE, the chip used in the second generation Inner Tracking System of ALICE, and serve as reference for future simulation studies of similar devices. The studied parameters include: reverse substrate bias, epitaxial layer thickness, charge collection electrode size and the spacing of the electrode to surrounding in-pixel electronics. The results from pixels of 28 um pitch confirm that even in partially depleted circuits, charge collection can be fast (<10 ns), and quantify the influence of the parameters onto the signal sharing and amplitudes, highlighting the importance of a correct spacing between wells and of the impact of the reverse substrate bias.
