论文标题
由DC反应性磁控溅射制备的纳米线单光子检测器制备的超导薄膜
Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors
论文作者
论文摘要
我们介绍了使用直流电流（DC）反应性磁控溅射的硝酸钼（MON）薄膜沉积的全面研究。我们研究了各种沉积条件对膜超导和电性能的影响。此外，我们已经表明，由5 nm Mon膜制成的蜿蜒形的单光子检测器在1550 nm的电信波长处具有饱和的量子检测效率。我们的结果表明，MON可能是低温超导体（包括单光子探测器和过渡边缘传感器）的实际应用的感兴趣材料。
We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current (DC) reactive magnetron sputtering. We have investigated the effect of various deposition conditions on the superconducting and electrical properties of the films. Furthermore, we have shown that meander-shaped single-photon detectors made from 5 nm MoN films have saturated quantum detection efficiency at the telecom wavelength of 1550 nm. Our results indicate that MoN may be a material of interest for practical applications of low-temperature superconductors, including single-photon detectors and transition-edge sensors.
