论文标题

CMOS后兼容铝制硝酸盐/2D通道铁电场效应 - 传播者

Post-CMOS Compatible Aluminum Scandium Nitride/2D Channel Ferroelectric Field-Effect-Transistor

论文作者

Liu, Xiwen, Wang, Dixiong, Zheng, Jeffrey, Musavigharavi, Pariasadat, Miao, Jinshui, Stach, Eric A., Olsson III, Roy H., Jariwala, Deep

论文摘要

1963年,莫尔和塔鲁伊(Moll)和塔鲁伊(Tarui)提出,半导体的现场效应电导率可以通过铁电(FE)材料的不分极化来控制,以创建铁电场效应晶体管(FE-FET)。然而,随后的生产实用,紧凑的FE-FET的努力受到低保留和与互补金属氧化物半导体(CMOS)过程整合的不相容的困扰。这些困难导致了基于捕获的内存设备(也称为浮动门或闪存内存)的开发,这些设备现在是主流的非挥发记忆(NVM)技术。在过去的二十年中,氧化FE材料的进步使铁电体的领域恢复活力,并使FE随机访问记忆(FE-RAM)成为商业现实。 Despite these advances, commercial FE-RAM based on lead zirconium titanate (PZT) has stalled at the 130 nm due to process challenges.The recent discovery of scandium doped aluminum nitride (AlScN) as a CMOS compatible ferroelectric presents new opportunities for direct memory integration with logic transistors due to the low temperature of AlScN deposition (approx. 350 C).该温度与CMOS的后端兼容。在这里,我们提出了一个由ALSCN Fe介电层组成的FE-FET设备,该层与范德华的通道层集成了二维(2D)半导体MOS2。我们的设备显示一个ON/OFF比率〜10^6,并发,标准化存储窗口为0.3 V/nm。这些设备还展示了稳定的两态内存保留率最多10^4秒。我们的模拟和实验结果表明,ALSCN和2D半导体的组合几乎是低功率FE-FET记忆的理想选择。这些结果证明了嵌入式内存和内存计算中的一种新方法,甚至可能导致有效的神经形态计算体系结构。

In 1963, Moll and Tarui suggested that the field-effect conductance of a semiconductor could be controlled by the remanent polarization of a ferroelectric (FE) material to create a ferroelectric field-effect transistor (FE-FET). However, subsequent efforts to produce a practical, compact FE-FET have been plagued by low retention and incompatibility with Complementary Metal Oxide Semiconductor (CMOS) process integration. These difficulties led to the development of trapped-charge based memory devices (also called floating gate or flash memory), and these are now the mainstream non-volatile memory (NVM) technology. Over the past two decades, advances in oxide FE materials have rejuvenated the field of ferroelectrics and made FE random access memories (FE-RAM) a commercial reality. Despite these advances, commercial FE-RAM based on lead zirconium titanate (PZT) has stalled at the 130 nm due to process challenges.The recent discovery of scandium doped aluminum nitride (AlScN) as a CMOS compatible ferroelectric presents new opportunities for direct memory integration with logic transistors due to the low temperature of AlScN deposition (approx. 350 C). This temperature is compatible with CMOS back end of line processes. Here, we present a FE-FET device composed of an AlScN FE dielectric layer integrated with a channel layer of a van der Waals two-dimensional (2D) semiconductor, MoS2. Our devices show an ON/OFF ratio ~ 10^6, concurrent with a normalized memory window of 0.3 V/nm. The devices also demonstrate stable, two-state memory retention for up to 10^4 seconds. Our simulations and experimental results suggest that the combination of AlScN and 2D semiconductors is nearly ideal for low power FE-FET memory. These results demonstrate a new approach in embedded memory and in-memory computing, and could even lead to effective neuromorphic computing architectures.

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