论文标题
测量原型定时光子计数器中纳米厚膜的透射二级电子产率
Measurement of the transmission secondary electron yield of nanometer-thick films in a prototype Timed Photon Counter
论文作者
论文摘要
我们使用定时光子计数器的原型版本（TIPC）来衡量纳米厚的Al $ _2 $ $ _3 $/tin/al $ _2 $ o $ $ _3 $胶片的传输二级电子产量。我们讨论了广泛测量产量的方法。然后，将收益率衡量，是着陆能源在$ 1.2 $和1.8美元之间的函数，发现在$ 0.1 $（$ 1.2 $ KEV）至$ 0.9 $（$ 1.8 $ KEV）的范围内。这些结果与通过不同独立的方法获得的数据一致。因此，我们得出的结论是，原型TIPC能够以透射二级电子产率来表征薄膜。此外，解释了与屈服确定无关的观察到的特征。
We measure the transmission secondary electron yield of nanometer-thick Al$_2$O$_3$/TiN/Al$_2$O$_3$ films using a prototype version of a Timed Photon Counter (TiPC). We discuss the method to measure the yield extensively. The yield is then measured as a function of landing energy between $1.2$ and $1.8$ keV and found to be in the range of $0.1$ ($1.2$ keV) to $0.9$ ($1.8$ keV). These results are in agreement to data obtained by a different, independent method. We therefore conclude that the prototype TiPC is able to characterise the thin films in terms of transmission secondary electron yield. Additionally, observed features which are unrelated to the yield determination are interpreted.
