论文标题
芯片上的八度触发磁静电波Yig谐振器
Octave-Tunable Magnetostatic Wave YIG Resonators on a Chip
论文作者
论文摘要
我们已经在芯片上设计，制造和表征了磁静态波（MSW）谐振器。通过在Gadolinium Garnet（GGG）底物上对单晶Yttrium Iron Garnet（YIG）膜进行构造，并通过Loop-Actuctor Transducer兴奋。我们通过开发YIG膜蚀刻工艺并制造厚铝铁植物波导（CPW）感应器环，实现了这一技术的突破，以分别解决并激发MSW。在4.77 GHz时，0.68平方毫米的谐振器可实现质量因子Q> 5000，偏置为987 OE。我们还通过应用平面外部磁场来证明YIG谐振器调谐从3.63到7.63 GHz。谐振器的测得的质量因子始终超过4 GHz。微加工技术可以在同一芯片上制造多个单端口和两个端口的YIG谐振器，所有谐振器都显示八度可调性和高Q。
We have designed, fabricated, and characterized magnetostatic wave (MSW) resonators on a chip. The resonators are fabricated by patterning single-crystal yttrium iron garnet (YIG) film on a gadolinium gallium garnet (GGG) substrate and excited by loop-inductor transducers. We achieved this technology breakthrough by developing a YIG film etching process and fabricating thick aluminum coplanar waveguide (CPW) inductor loop around each resonator to individually address and excite MSWs. At 4.77 GHz, the 0.68 square mm resonator achieves a quality factor Q > 5000 with a bias field of 987 Oe. We also demonstrate YIG resonator tuning by more than one octave from 3.63 to 7.63 GHz by applying an in-plane external magnetic field. The measured quality factor of the resonator is consistently over 3000 above 4 GHz. The micromachining technology enables the fabrication of multiple single- and two-port YIG resonators on the same chip with all resonators demonstrating octave tunability and high Q .
