论文标题

氧化和渗碳催化剂调节,以控制大型晶体单层六角硼的受控生长和转移

Oxidising and carburising catalyst conditioning for the controlled growth and transfer of large crystal monolayer hexagonal boron nitride

论文作者

Babenko, Vitaliy, Fan, Ye, Veigang-Radulescu, Vlad-Petru, Brennan, Barry, Pollard, Andrew J., Burton, Oliver, Alexander-Webber, Jack A., Weatherup, Robert S., Canto, Barbara, Otto, Martin, Neumaier, Daniel, Hofmann, Stephan

论文摘要

六角硼硝酸盐(H-BN)是2D材料技术的必要支持,封装和障碍,但最近也作为从双曲线元面孔到室温单光子源的活性材料。至关重要的是,需要成本效益,可扩展性和高质量的增长技术。我们利用了H BN的催化化学蒸气沉积(CVD),并报告了大量溶解物种在H-BN CVD中的重要作用,特别是溶解氧和碳之间的平衡。铁箔的简单增长前调理步骤使我们能够量身定制易于宽敞的可扩展CVD工艺,以提供异常大的H-BN单层域。我们还开发了一种轻松的方法,可通过受控的湿度氧化和随后快速蚀刻薄界面铁氧化铁的方式来改善生长的H-BN从铁表面转移。因此,避免了大部分箔的杂质。我们展示了晶圆尺度(2英寸)的生产,并利用该H-BN作为石墨烯的保护层,用于集成(Opto)电子设备制造。

Hexagonal boron nitride (h-BN) is well-established as a requisite support, encapsulant and barrier for 2D material technologies, but also recently as an active material for applications ranging from hyperbolic metasurfaces to room temperature single-photon sources. Cost-effective, scalable and high quality growth techniques for h-BN layers are critically required. We utilise widely-available iron foils for the catalytic chemical vapour deposition (CVD) of h BN and report on the significant role of bulk dissolved species in h-BN CVD, and specifically, the balance between dissolved oxygen and carbon. A simple pre-growth conditioning step of the iron foils enables us to tailor an error-tolerant scalable CVD process to give exceptionally large h-BN monolayer domains. We also develop a facile method for the improved transfer of as-grown h-BN away from the iron surface by means of the controlled humidity oxidation and subsequent rapid etching of a thin interfacial iron oxide; thus, avoiding the impurities from the bulk of the foil. We demonstrate wafer-scale (2 inch) production and utilise this h-BN as a protective layer for graphene towards integrated (opto) electronic device fabrication.

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