论文标题
低损坏的氢化无定形硅膜用于超导谐振器
Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators
论文作者
论文摘要
毫米毫米钟天文学中使用的超导谐振器将从介电损失较小的沉积电介质中受益匪浅。我们在100°C，250°C和350°C的底物温度下，使用血浆增强化学蒸气沉积沉积了氢化的无定形硅膜。测得的空隙体积分数，氢含量，微结构参数和键角障碍与底物温度负相关。这三部电影的损失均低于$ 10^{-5} $，均为$ 10^5 $光子的谐振器，在120 mk和4-7 GHz。这使这些膜有望用于微波动力学电感探测器和片上毫米 - 补可能计过滤器。
Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below $10^{-5}$ for a resonator energy of $10^5$ photons, at 120 mK and 4-7 GHz. This makes these films promising for microwave kinetic inductance detectors and on-chip millimeter-submilimeter filters.
