论文标题

可扩展$ \ rm al_2o_3-tio_2 $导电氧化物接口作为电阻开关设备的缺陷储存库

Scalable $\rm Al_2O_3-TiO_2$ Conductive Oxide Interfaces as Defect Reservoirs for Resistive Switching Devices

论文作者

Li, Yang, Wang, Wei, Zhang, Di, Baskin, Maria, Chen, Aiping, Kvatinsky, Shahar, Yalon, Eilam, Kornblum, Lior

论文摘要

电阻开关设备预示着一种用于记忆和计算的变革性技术,在性能和能源效率方面具有相当大的优势。在这里,我们采用了一个简单且可扩展的材料系统,用于氧化导电界面,并利用其独特的特性来为一种新型的电阻开关设备。我们首次演示了基于Valence-Crange-Cressive开关设备的$ \ rm al_2o_3-Tio_2 $,其中导电氧化物接口既用作后电极,又用作用于开关的缺陷储备。遵循简化二维电子气体(2DEGS)制造的技术路径,获得了无定形 - 聚晶体$ \ rm al_2o_3-tio_2 $导电接口,从而使它们更可扩展实用质量集成。我们将设备化学和微观结构的物理分析与对其开关行为和性能的全面电气分析相结合。我们指出了电阻式切换到导电氧化导电界面的起源,该氧化导电界面是底部电极和氧气空位的储层。后者在换价电阻开关设备中起关键作用。该新设备基于可扩展和互补的金属氧化物 - 氧化型 - 副导体(CMOS)技术兼容的制造工艺,为提高可调性和简化设备选择挑战的新设计空间开辟了新的设计空间。

Resistive switching devices herald a transformative technology for memory and computation, offering considerable advantages in performance and energy efficiency. Here we employ a simple and scalable material system of conductive oxide interfaces and leverage their unique properties for a new type of resistive switching device. For the first time, we demonstrate an $\rm Al_2O_3-TiO_2$ based valence-change resistive switching device, where the conductive oxide interface serves both as the back electrode and as a reservoir of defects for switching. The amorphous-polycrystalline $\rm Al_2O_3-TiO_2$ conductive interface is obtained following the technological path of simplifying the fabrication of the two-dimensional electron gases (2DEGs), making them more scalable for practical mass integration. We combine physical analysis of the device chemistry and microstructure with comprehensive electrical analysis of its switching behavior and performance. We pinpoint the origin of the resistive switching to the conductive oxide interface, which serves as the bottom electrode and as a reservoir of oxygen vacancies. The latter plays a key role in valence-change resistive switching devices. The new device, based on scalable and complementary metal-oxide-semiconductor (CMOS) technology-compatible fabrication processes, opens new design spaces towards increased tunability and simplification of the device selection challenge.

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