论文标题
成像散射仪，用于观察空气退火期间光学涂层的变化
Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing
论文作者
论文摘要
空气退火通常会降低无定形涂层中的吸收，散射和机械损失，直到发生损害的温度。我们的仪器使用带有视口的工业烤箱来观察退火过程中的涂层散射和损坏。
Air annealing generally reduces absorption, scattering, and mechanical loss in amorphous coatings up to temperatures where damage occurs. Our instrument uses an industrial oven with viewports to observe coating scatter and damage during annealing.
