论文标题
基于Fabry Perot微型腔的差分MOEM加速度计的设计和制造
Design and Fabrication of a Differential MOEMS Accelerometer Based on Fabry Perot micro-cavities
论文作者
论文摘要
在本文中，提出了基于Fabry-Perot（FP）微型腔的差分MOEM加速度计。该设备的光学系统由两个FP腔组成，机械系统由一个被四个弹簧悬挂的证明质量组成。应用的加速度倾向于将PM从其静止位置移动。该机械位移可以通过在较大的质量横截面和光纤端面之间形成的FP干涉仪来测量。所提出的传感器使用散装微加工方法在绝缘子（SOI）晶片上制造。传感器表征的结果表明，加速度计的线性响应在1G范围内。同样，在静态表征中，传感器的光敏性和分辨率为6.52 nm/g和153倍。功率测量中的传感器灵敏度为49.6 mV/g，其谐振为1372 Hz。使用差分测量方法增加了加速度计的灵敏度。基于实验数据，传感器敏感性是具有一个FP腔的类似MOEM加速度计的两倍。
In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is suspended by four springs. The applied acceleration tends to move the PM from its resting position. This mechanical displacement can be measured by the FP interferometer formed between the proof mass cross-section and the optical fiber end face. The proposed sensor is fabricated on a silicon on insulator (SOI) wafer using the bulk micromachining method. The results of the sensor characterization show that the accelerometer has a linear response in the range of 1g. Also, the optical sensitivity and resolution of the sensor in the static characterization are 6.52 nm/g and 153ug. The sensor sensitivity in the power measurement is 49.6 mV/g and its resonant is at 1372 Hz. Using the differential measurement method increases the sensitivity of the accelerometer. Based on experimental data, the sensor sensitivity is two times as high as that of a similar MOEMS accelerometer with one FP cavity.
