论文标题
基于悬臂臂结构的有效折射率超声传感器的数值分析基于悬臂臂结构的双微粒环谐振器
Numerical analysis of effective refractive index ultrasonic sensor based on Cantilever arm structure slot-based dual-micro-ring resonator
论文作者
论文摘要
我们提出了一种新型的超声传感器结构，该结构由悬臂臂结构插槽插槽双 - 丝环谐振器（DMRR）组成。我们通过使用耦合模式理论对传输进行理论分析。模式场分布和传输光谱的声音分布是从基于Comsol Multi-physics Mections Mections的3D模拟获得的传输光谱。 1462.5mV/kPa，比单个基于单插槽的微型超声超声传感器高22倍。您的超声传感器提供了更高的灵敏度和更大的检测频率范围，而基于压电的超声传感器的检测频率范围更大。结果可以通过更换位置和超级式的canim-sempors files。大约1540，半径为5UM，我们检测到-90O至90O的角范围，最小距离为0.01UM。最后，我们计算悬臂臂结构插槽DMRR阵列超声传感器的光学性能。我们提出的设计为水音提供了有希望的候选人。
We propose a novel ultrasonic sensor structure composed of Cantilever arm structure slot dual-micro-ring resonators(DMRR).We present a theoretical analysis of transmission by using the coupled mode theory.The mode field distributions and sound pressure distributions of transmission spectrum are obtained from 3D simulations based on Comsol Multi-physics(COMSOL)method.Our ultrasonic sensor exhibit theoretical sensitivity as high as 1462.5mV/kPa,which is 22 times higher than that of single slot-based micro-ring ultrasonic sensor.Our ultrasonic sensor offers higher sensitivity and a larger detection frequency range than conventional piezoelectric based ultrasound transducer.The results show that the sensing characteristics of our system can be optimized through changing the position and the angle of sound field.Our ultrasonic sensor with an area of 25um*60um, the-factor can be approximately 1540 with radius of 5um We detect an angular range of -90o to 90o and a minimum distance of 0.01um. Finally,we calculate the Cantilever arm structure slot DMRR array ultrasonic sensor's optical performance. Our proposed design provides a promising candidate for a hydrophone.
