论文标题
部分可观测时空混沌系统的无模型预测
Noncontact measurement method of linear and angular displacement based on dual-beam feedback interferometric system
论文作者
论文摘要
这项研究描述了一种独特的光学方法，用于对线性和角位移的非连接测量。与以前的方法相比，基于双光束相调节的反馈干涉法提供了更高的灵敏度，对非合作目标和有关角度测量的更广泛范围提供了更高的敏感性。线性和角位移的量是通过追踪差异束的相变量来计算的。通过测试原型系统评估所提出的方法的性能。根据实验数据，该原型在1小时内具有35 nm和0.15“的稳定性，分辨率为1 nm和0.02”。线性在100 mm和1.34*10^{ - 4}的范围内为5.58*10^{ - 6}，在360°的范围内，表明所提出的方法对于高精度计量应用可能具有很大的潜力。
This study describes a unique optical approach for the noncontact measurement of linear and angular displacement. Compared to previous methods, the sensor system here based on the dual-beam phase-modulated feedback interferometry provides higher sensitivity for non-cooperative targets and a wider range concerning the angle measurement. The amount of linear and angular displacement is calculated by tracing the phase changes of the differential beams. Performance of the proposed method is evaluated via testing a prototype system. The prototype has a 35 nm and 0.15" stability over 1 hour, with a resolution of 1 nm and 0.02" correspondingly, according to the experimental data. The linearity is 5.58*10^{-6} in the range of 100 mm and 1.34*10^{-4} in the range of 360°, indicating that the proposed method may possess considerable potential for high-precision metrological applications.
