论文标题
Ultrathin，溅射沉积，唯一的无定形合金膜和钼膜
Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum
论文作者
论文摘要
显微镜和衍射测量值是通过标准溅射沉积获得的唯一和钼的超薄二元合金膜和钼的。对于接近Ru50mo50的作品，我们发现电影是无定形的。膜的非态性伴随着相对于钌或钼较厚膜的粗糙度的粗糙度显着降低。我们将其归因于缺乏单独元素多晶膜的特征的谷物结构。
Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and molybdenum that are obtained by standard sputter deposition. For compositions close to Ru50Mo50, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements.
