论文标题
放松和高压力前的弦弦谐振器的动态
Relaxation and dynamics of high-stress pre-displaced string resonators
论文作者
论文摘要
由高压力材料制成的预拆下位置的微机械谐振器会产生新的丰富的静态和动态行为。在这里，提出了一个分析模型来描述此类前放置的谐振器的机制。得出弯曲和张力能，并通过应用最小动作原理获得了修改的Euler-Bernoulli方程。通过将模型投射到余弦形上，可以看到能量景观，并对应力和频率的前置依赖性进行半分析研究。分析通过有限元模拟进行扩展，包括模式形状，悬垂的作用和应力分布。
Pre-displaced micromechanical resonators made from high-stress material give rise to new rich static and dynamic behavior. Here, an analytical model is presented to describe the mechanics of such pre-displaced resonators. The bending and tension energies are derived and a modified Euler-Bernoulli equation is obtained by applying the least action principle. By projecting the model onto a cosine shape, the energy landscape is visualized, and the pre-displacement dependence of stress and frequency is studied semi-analytically. The analysis is extended with finite-element simulations, including the mode shape, the role of overhang, and the stress distribution.
