论文标题
基于角度依赖磁性声音耦合的自偏见磁场传感器
Self-biased SAW Magnetic Field Sensors Based on Angle Dependent Magneto-acoustic Coupling
论文作者
论文摘要
基于表面声波（SAW）的设备已通过将磁性层与巨型ΔE/ΔG效应整合到磁场传感的一种有前途的技术中。但是，几乎所有的SAW磁场传感器都需要一个偏置场才能获得高灵敏度。此外，磁音耦合的真实本质仍然提出了理解和设计这种设备的主要挑战。在当前工作中，考虑到偶极 - 偶极相互作用的重要作用，建立了用于ΔE/ΔG效应的动态磁弹性模型。该模型还将实施到FEM软件中，以计算多个制造的传感器的共振频率响应，这些传感器在声波矢量和诱导的单轴磁各向异性之间具有不同的ψ角。测得的结果与模拟结果非常吻合。具有优化的ψ角的零偏置场，在零偏置场上实现了630.4 kHz/oe的强共振频率灵敏度（RFS）。此外，沿不同方向的RFS测量验证其矢量感应能力。
Surface-acoustic-wave (SAW) based devices have emerged as a promising technology in magnetic field sensing by integrating a magnetostrictive layer with the giant ΔE/ΔG effect. However, almost all SAW magnetic field sensors require a bias field to obtain high sensitivity. In addition, the true nature of magneto-acoustic coupling still presents a major challenge in understanding and designing of this kind of devices. In current work, a dynamic magnetoelastic model for the ΔE/ΔG effect is established in consideration of the important role of the dipole-dipole interaction. The model is also implemented into a FEM software to calculate the resonance frequency responses of multiple fabricated sensors with different ψ angles between of the acoustic wave vector and the induced uniaxial magnetic anisotropy. The measured results are in excellent agreement with the simulated ones. A strong resonance frequency sensitivity (RFS) of 630.4 kHz/Oe was achieved at zero bias field for the device with optimized ψ angle. Furthermore, the RFS measurements along different directions verify its vector-sensing capability.
