论文标题
硅孔光学
Silicon Pore Optics
论文作者
论文摘要
硅孔隙光学（SPO）使用市售的单晶双面超抛光硅晶片作为产生形成轻质高分辨率高分辨率X射线光学元件的镜子的基础。该技术是由余弦测量系统和欧洲航天局（ESA）发明的，并与科学和工业合作伙伴一起开发了质量生产水平。它利用半导体行业数十年来开发的技术和过程来处理，过程和清洁硅晶片和盘子。 SPO是一种用于大型太空X射线望远镜（例如雅典娜和Arcus）的技术，在0.2至12 KEV频段中运行，角度分辨率为5弧秒。 SPO还显示是一种多功能技术，可以为伽马射线光学，医疗应用和物质研究而进一步开发。
Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided super-polished silicon wafers as a basis to produce mirrors that form lightweight high-resolution X-ray optics. The technology has been invented by cosine Measurement Systems and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. It leverages techniques and processes developed over decades by the semiconductor industry to handle, process, and clean silicon wafers and plates. SPO is an enabling technology for large space-borne X-ray telescopes such as Athena and ARCUS, operating in the 0.2 to 12 keV band, with angular resolution aiming for 5 arc seconds. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research.
