论文标题
超过60 GHz的带宽超快碳纳米管光电探测器
Ultrafast carbon nanotube photodetectors with bandwidth over 60 GHz
论文作者
论文摘要
未来的片间和片间的互连连接需要具有高带宽，超宽波带，紧凑的足迹，低成本和兼容的整合过程的光电检测器与硅互补金属氧化物 - 氧化 - 氧化型 - 氧化物 - 副导体（CMOS）技术。在这里，我们演示了CMOS兼容的碳纳米管（CNT）光电探测器，该光电探测器在所有基于高纯度CNT阵列的光学电信频段上表现出较高的响应性，高带宽和宽光谱操作。 Ultrafast CNT光电探测器展示了100 GBIT/S NYQUIST形状的开关键（OOK）信号传输，这可以解决数据中心之间和之间对高速光学互连的需求。此外，光电探测器通过将活性区域缩放到20μm2，在60 GHz上表现出带宽。由于CNT光电探测器是通过无掺杂过程制造的，因此它还提供了一种具有成本效益的解决方案，可以将CNT光子设备与基于CNT的CMOS集成电路集成。我们的工作为未来基于CNT的高速光学互连和光电集成电路（OEIC）的方式铺平了一种方式。
The future interconnect links in intra- and inter-chip require the photodetector with high bandwidth, ultra-wide waveband, compact footprint, low-cost, and compatible integration process with silicon complementary metal-oxide-semiconductor (CMOS) technology. Here, we demonstrate a CMOS-compatible carbon nanotube (CNT) photodetector that exhibits high responsivity, high bandwidth and broad spectral operation over all optical telecommunication band based on high-purity CNT arrays. The ultrafast CNT photodetector demonstrates the 100 Gbit/s Nyquist-shaped on-off-keying (OOK) signal transmission, which can address the demand for high-speed optical interconnects in and between data centers. Furthermore, the photodetector exhibits a bandwidth over 60 GHz by scaling down the active area to 20 μm2. As the CNT photodetectors are fabricated by doping-free process, it also provides a cost-effective solution to integrate CNT photonic devices with CNT-based CMOS integrated circuits. Our work paves a way for future CNT-based high-speed optical interconnects and optoelectronic integrated circuits (OEICs).
