论文标题
使用血浆浓缩离子束在固体中进行辐射效应研究的新方法
A New Methodology for Radiation Effects Studies in Solids using the Plasma Focused Ion Beam
论文作者
论文摘要
本文通过使用血浆浓缩离子束（PFIB）引入了一种用于固体辐射效应的基本研究的新方法。离子诱导的单晶纯SI的非晶化的经典示例用作概念验证实验，该实验描述了这种新技术的优势和局限性。我们证明了一种新的离子辐照模式的可行性和发明，该模式包括在多种剂量的多种区域中辐照单个特异性。目前的方法提出了对试样上离子光束的非常精确的控制，而通量仅在1％的范围内出现误差。此外，与常规离子加速器和植入剂相比，提出的方法允许剂量率更高的样品照射。预计该方法将在极端的材料范围之外开放新的研究领域，例如在纳米图案和纳米版本制造中。
A new methodology for fundamental studies of radiation effects in solids is herein introduced by using a plasma Focused Ion Beam (PFIB). The classical example of ion-induced amorphization of single-crystalline pure Si is used as a proof-of-concept experiment that delineates the advantages and limitations of this new technique. We demonstrate both the feasibility and invention of a new ion irradiation mode consisting of irradiating a single-specimen in multiple areas, at multiple doses, in specific sites. This present methodology suggests a very precise control of the ion beam over the specimen, with an error in the flux on the order of only 1%. In addition, the proposed methodology allows the irradiation of specimens with higher dose rates when compared with conventional ion accelerators and implanters. This methodology is expected to open new research frontiers beyond the scope of materials at extremes such as in nanopatterning and nanodevices fabrication.
