论文标题

腔体增强的2D材料量子发射器与氮化硅微孔子确定性整合

Cavity-Enhanced 2D Material Quantum Emitters Deterministically Integrated with Silicon Nitride Microresonators

论文作者

Parto, Kamyar, Azzam, Shaimaa I., Lewis, Nicholas, Patel, Sahil D., Umezawa, Sammy, Watanabe, Kenji, Taniguchi, Takashi, Moody, Galan

论文摘要

2D材料中的光学活性缺陷,例如六角硼(HBN)和过渡金属二核苷(TMDS),是一种有吸引力的单光子发射剂,具有高亮度,室内温度较高,室内温度操作,Emitter阵列的特定地点工程,以及具有外部应变和电场和电场和电场的调谐功能。在这项工作中,我们演示了一种新颖的方法,可以在无背景的氮化硅微孔谐振器中精确对齐和嵌入HBN和TMD。通过purcell效应,高纯度HBN发射器在室温下表现出高达$ 46 \%$的空腔增强光谱耦合效率,这超过了无腔指导的理论限制,几乎是刻录命令。这些设备由CMOS兼容的过程制造,并且没有表现出2D材料光学特性,对热退火的鲁棒性以及单模型波导中量子发射器的100 nm定位精度,为具有量距的量子光子芯片提供了具有Onemand Single-Photon源的可缩放量子芯片的路径。

Optically active defects in 2D materials, such as hexagonal boron nitride (hBN) and transition metal dichalcogenides (TMDs), are an attractive class of single-photon emitters with high brightness, room-temperature operation, site-specific engineering of emitter arrays, and tunability with external strain and electric fields. In this work, we demonstrate a novel approach to precisely align and embed hBN and TMDs within background-free silicon nitride microring resonators. Through the Purcell effect, high-purity hBN emitters exhibit a cavity-enhanced spectral coupling efficiency up to $46\%$ at room temperature, which exceeds the theoretical limit for cavity-free waveguide-emitter coupling and previous demonstrations by nearly an order-of-magnitude. The devices are fabricated with a CMOS-compatible process and exhibit no degradation of the 2D material optical properties, robustness to thermal annealing, and 100 nm positioning accuracy of quantum emitters within single-mode waveguides, opening a path for scalable quantum photonic chips with on-demand single-photon sources.

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