论文标题

硅插位器的开发:朝着超大放射性背景光电探测器系统

Development of silicon interposer: towards an ultralow radioactivity background photodetector system

论文作者

Yang, Haibo, Wang, Qidong, Cao, Guofu, Melby, Kali M., Harouaka, Khadouja, Arnquist, Isaac J., Dai, Fengwei, Cao, Liqiang, Wen, Liangjian

论文摘要

在罕见事件搜索中,开发具有超级放射性背景的光电探测器系统非常重要。硅光电培养基(SIPM)和特定于应用的集成电路(ASIC)分别是低背景光电传感器和读取电子设备的两个理想候选者,因为它们主要由硅组成,它们可以在没有相当大额外努力的情况下实现良好的无线电纯度。但是,用于在构建超大背景光电轨道的瓶颈中,用于提供光电传感器和电子设备之间的机械支撑和信号路线的插入器。硅和石英是两个候选者,用于构造低背景插头,因为它们的无线电纯度良好。然而,通过硅VIA(TSV)或通过大面积硅或石英晶片上的石英VIA(TQV)生产并非平凡。在这项工作中,基于双面TSV互连技术,我们开发了第一个硅插音器的原型,其大小为10〜cm $ \ times $ 10〜cm,厚度为320〜 $ $ m。在室温下仔细评估了插音机的电气性能,并且还以-110〜 $^\ Circ $ c进行了插入器上的SIPM。测试结果显示了原型的有希望的性能,并且可以从SIPM清楚地观察到单个光电子信号。观察到的信号的特征与安装在正常基于FR4的PCB上的SIPM的特征相当。基于硅间插座原型的成功,我们开始了旨在进一步改善硅插孔的性能和产量的后续研究,并最终提供了建立超级背景光探测器系统的解决方案。

It is of great importance to develop a photodetector system with an ultralow radioactivity background in rare event searches. Silicon photomultipliers (SiPMs) and application-specific integrated circuits (ASICs) are two ideal candidates for low background photosensors and readout electronics, respectively, because they are mainly composed of silicon, which can achieve good radio-purity without considerable extra effort. However, interposers, used to provide mechanical support and signal routes between the photosensor and the electronics, are a bottleneck in building ultralow background photodetectors. Silicon and quartz are two candidates to construct the low background interposer because of their good radio-purity; nevertheless, it is non-trivial to produce through silicon vias (TSV) or through quartz vias (TQV) on the large area silicon or quartz wafer. In this work, based on double-sided TSV interconnect technology, we developed the first prototype of a silicon interposer with a size of 10~cm$\times$10~cm and a thickness of 320~$μ$m. The electrical properties of the interposer are carefully evaluated at room temperature, and its performance is also examined at -110~$^\circ$C with an integrated SiPM on the interposer. The testing results reveal quite promising performance of the prototype, and the single photoelectron signals can be clearly observed from the SiPM. The features of the observed signals are comparable with those from the SiPM mounted on a normal FR4-based PCB. Based on the success of the silicon interposer prototype, we started the follow-up studies that aimed to further improve the performance and yield of the silicon interposer, and eventually to provide a solution for building an ultralow background photodetector system.

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