论文标题

种子密度对连续超薄纳米座膜形成的影响:一种分析方法

Impact of seed density on continuous ultrathin nanodiamond film formation: an analytical approach

论文作者

Tomellini, Massimo, Polini, Riccardo

论文摘要

已经开发了一种用于描述膜生长时间演化时间演化时间的分析平均方法。该建模涉及各向异性生长的通用情况,其增长率分别在基板平面(正常)上。通过通过硬核相互作用包括种子之间的空间相关效应来考虑种子的有限大小。该方法基于概率理论,以封闭形式为平均膜厚度提供解决方案,这是底物覆盖率,种子密度和种子初始大小的函数。对于通过种子对底物的初始覆盖范围的可忽略的值,可以实现可管理的分析表达式。该模型已通过与文献中可用的实验数据进行比较来验证。这项研究与确定超薄纳米晶钻(NCD)膜最佳生长条件的可能性有关。实际上,允许给定最小连续膜平均厚度的播种/成核密度的知识对于技术先进的应用的开发至关重要。

An analytical mean field approach for describing the time evolution of film growth by seeding has been developed. The modeling deals with the generic case of anisotropic growth with different growth rates, respectively on -- and normal to -- the substrate plane. The finite size of the seeds is considered by including spatial correlation effects among seeds through hard-core interactions. The approach, based on probability theory, provides solution in closed form for mean film thickness as a function of substrate coverage, seed density and initial size of the seeds. For negligible values of the initial coverage of the substrate by seeds, manageable analytical expressions are attained. The model has been validated by comparison with experimental data available in the literature. This study is significant in connection to the possibility of determining optimal growth conditions for ultrathin nanocrystalline diamond (NCD) film. In fact, the knowledge of the seeding/nucleation density that allows a given minimum average thickness of continuous film is of utmost importance for the development of technologically advanced applications.

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