论文标题
映射单发角度分辨的光谱微观细胞测定法，低5微米的横向分辨率
Mapping single-shot angle-resolved spectroscopic micro-ellipsometry with sub-5 microns lateral resolution
论文作者
论文摘要
光谱椭圆法是一种在行业和研究中广泛使用的光学技术，用于确定薄膜的光学性质和厚度。对横向分辨率和数据采集率的技术限制抑制了光谱椭圆法对微结构的有效使用。在这里，我们引入了光谱微纤维计（SME），能够以单次发射的多角度测量频谱分辨的椭圆测量数据，横向分辨率低于2微米。通过添加一些库存光学元件，可以轻松地集成中小企业中的通用光学显微镜。我们通过中小型企业表现出复杂的折射率和厚度测量，这与商业光谱椭圆机非常吻合。作为其准确性和高横向分辨率的应用，中小型企业可以表征光学特性和去角质过渡金属二盐元素化和石墨烯的层的层，用于尺寸几微米的结构。
Spectroscopic ellipsometry is a widely used optical technique both in industry and research for determining the optical properties and thickness of thin films. The effective use of spectroscopic ellipsometry on micro-structures is inhibited by technical limitations on lateral resolution and data acquisition rate. Here we introduce a spectroscopic micro-ellipsometer (SME), capable of measuring spectrally resolved ellipsometric data at many angles of incidence in a single-shot with a lateral resolution down to 2 microns. The SME can be easily integrated into generic optical microscopes by addition of a few stock optics. We demonstrate complex refractive index and thickness measurements by the SME which are in excellent agreement with a commercial spectroscopic ellipsometer. As an application for its accuracy and high lateral resolution, the SME can characterize the optical properties and number of layers of exfoliated transition-metal dichalcogenides and graphene, for structures that are a few microns in size.
