论文标题
在有限大小的应变工程中形成外延台面的放松
Shape relaxation of epitaxial mesa for finite-size strain-engineering
论文作者
论文摘要
Silicon-Germanium(Si $ _ {1-X} $ GE $ _X $)层通常用作MOSFET设备大门中的压力源。预计他们将在漂移和通道区域引入有益的应力,以增强电子迁移率。当减少门侧尺寸时,主要问题之一是应力松弛,这会导致电子迁移率显着降低。我们报告了由于有限尺寸效应而导致的菌株不均匀性驱动的硅门(MESA)上紧张的外延sige纳米层的新形态演变。与紧张的膜的自我诱导的不稳定不同,由于源自自由边界的弹性不均匀性,这种进化是在这里产生的。我们分析了热力学表面扩散框架内的生长动力学,这些框架占了弹性和毛细血管,由于通风的形式,前者在二维上解决了。所得的动态方程式通过对本征模的分解来求解,并根据MESA几何参数揭示了不同的发展。传质发生在松弛的区域,并在纳米层的自由表面产生串珠,其w或v形状随时间和几何形状的函数。然后,进化由结构的比例及其比例控制。
Silicon-Germanium (Si$_{1-x}$Ge$_x$) layers are commonly used as stressors in the gate of MOSFET devices. They are expected to introduce a beneficial stress in the drift and channel regions to enhance the electron mobility. When reducing the gate lateral size, one of the major issues is the stress relaxation which results in a significant decrease in the electron mobility. We report a new morphological evolution of a strained epitaxial SiGe nanolayer on a silicon gate (mesa) driven by strain inhomogeneity due to finite-size effects. Unlike the self-induced instability of strained films, this evolution arises here due to the elastic inhomogeneity originating from the free frontiers. We analyze the growth dynamics within the thermodynamic surface diffusion framework accounting for elasticity and capillarity, the former being solved in two dimensions thanks to the Airy formalism. The resulting dynamical equation is solved with a decomposition on eigenmodes, and reveals different developments depending upon the mesa geometric parameters. Mass transfer occurs towards the relaxed areas and creates a beading at the nanolayers free surface with either a W or V shape as a function of time and geometry. The evolution is then controlled by the proportions of the structure as well as its scale.