论文标题
从微型手持剂的原位溅射以通过聚焦 - 离子束对原子探针层析成像进行低温制备
In-situ sputtering from the micromanipulator to enable cryogenic preparation of specimens for atom probe tomography by focused-ion beam
论文作者
论文摘要
在过去的十年中，已经开发了工作流程，以在低温温度下实现原子探针断层扫描分析。无法在低温温度下从气体注入系统（GIS）中控制金属前体的局部沉积，从而通过在聚焦离子束中使用极具挑战性来制备位点特异性样品。 Schreiber等。利用重新沉积以将提升样品焊接给支撑。在这里，我们以它们的方法来建立利益区域的方法，并在微观手持中加强与局部溅射金属的界面。遵循标准的聚焦束环形铣削，我们证明了在激光脉冲和电压模式下对Si的原子探针分析，并具有可比的分析性能作为预先汇总的Microtip息票。我们的焊接方法是多功能的，因为可以将各种金属用于溅射，并且在原则上允许与GIS类似的灵活性。
Workflows have been developed in the past decade to enable atom probe tomography analysis at cryogenic temperatures. The inability to control the local deposition of the metallic precursor from the gas-injection system (GIS) at cryogenic temperature makes the preparation of site-specific specimens by using lift-out extremely challenging in the focused-ion beam. Schreiber et al. exploited redeposition to weld the lifted-out sample to a support. Here we build on their approach to attach the region-of-interest and additionally strengthen the interface with locally sputtered metal from the micromanipulator. Following standard focused-ion beam annular milling, we demonstrate atom probe analysis of Si in both laser pulsing and voltage mode, with comparable analytical performance as a pre-sharpened microtip coupon. Our welding approach is versatile, as various metals could be used for sputtering, and allows similar flexibility as the GIS in principle.
