论文标题
用于纳米尺度成像的桌面X射线断层扫描仪器：1,000个元素过渡传感器子阵列的演示
A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray
论文作者
论文摘要
我们报告了1,000个元素的过渡 - 传感器（TES）X射线光谱仪的实现（TOMCAT）。 Tomcat结合了高空间分辨率扫描电子显微镜（SEM）和高效且像素化的TES光谱仪，以重建纳米级集成电路（ICS）的三维图。最近使用了240像素原型光谱仪在130 nm技术节点上重建IC，但是为了将成像速度提高到更实际的水平，需要提高探测器效率。因此，我们正在构建一个光谱仪，该光谱仪最终将包含3,000台TES微钙化器，并使用微波超导量量子干扰装置（Squid）多路复用，并且我们目前已委托1,000台TES子阵列。这仍然代表了240像素系统的重大改进，并且使我们能够开始表征整个光谱仪的性能。在992最大可用读数通道中，我们产生了818个设备，代表了迄今为止读取的最多数量的TES X射线微含量。这些微钙化器已针对脉搏速度而不是纯粹的能量分辨率进行了优化，我们在8.0 kev cu k $α$线上测量了14 eV的FWHM能量分辨率。
We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recently used to reconstruct ICs at the 130 nm technology node, but to increase imaging speed to more practical levels, the detector efficiency needs to be improved. For this reason, we are building a spectrometer that will eventually contain 3,000 TES microcalorimeters read out with microwave superconducting quantum interference device (SQUID) multiplexing, and we currently have commissioned a 1,000 TES subarray. This still represents a significant improvement from the 240-pixel system and allows us to begin characterizing the full spectrometer performance. Of the 992 maximimum available readout channels, we have yielded 818 devices, representing the largest number of TES x-ray microcalorimeters simultaneously read out to date. These microcalorimeters have been optimized for pulse speed rather than purely energy resolution, and we measure a FWHM energy resolution of 14 eV at the 8.0 keV Cu K$α$ line.
